Schedule

Technical Program

The 2024 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) will be held at the Monterey Marriott in Monterey, CA from April 15-18, 2024.

The FCMN will bring together scientists and engineers interested in all aspects of the characterization technology needed for nanoelectronic materials and device research, development, integration, and manufacturing. All approaches are welcome: chemical, physical, electrical, magnetic, optical, in situ, and real-time control and monitoring. The semiconductor industry is evolving rapidly:  the conference will highlight major issues and provide critical reviews of important materials and structure characterization and nearline/inline metrology methods, including hardware, data analysis, and AI and machine learning, as the industry both extends the technology deep into the nanoscale and increases the diversity of devices and systems.

The conference consists of formal invited presentation sessions and poster sessions for contributed papers and three (3) tutorial sessions. The poster papers cover new developments in materials and structure characterization/metrology down to the nanoscale. The conference began in 1995, and this meeting is the 14th in the series.

Tutorial Sessions

The FCMN 2024 organizers have scheduled three (3) limited seating tutorials. Both will take place on Monday, April 15, 2024. Advance registration is required and space is limited to 20 people per tutorial. Registration will be on a first-come, first-served basis.

Tutorial Session I: Machine Learning and its Application to Metrology

Time:  2:00-4:00 p.m.
Cost: $100
Presenter:  Dragan Djurdjanovic , UT Austin

Tutorial Session II: Metrology Techniques

Time:  2:00-4:00 p.m.
Cost: $100
Presenters: Alain Diebold, University of Albany and Paul van der Heide, Imec

Tutorial Session III: Advanced Packaging

Time:  4:30-6:30 p.m.
Cost: $100
Presenter: Ofer Adan, Applied Materials

Invited Speakers